A High Frequency High Flow Rate Piezoelectrically Driven MEMS Micropump

A piezoelectrically driven fluidic micropump was fabricated and tested.Microelectromechanical systems (MEMS) fabrication technology was used.Small cylindrical piezoelectric material elements were integrated with microfabricated silicon, silicon on insulator (SOI), and glass chips using eutectic bonding and anodic bonding processes.SO1 wafers were used to form the thin membranes within the moving parts (a drive element and two passive valves).The design, microfabrication process, and assembly of the device are described in this paper.Fabrication issues such as control of fillet radii at the feet of the Si membranes for stress reduction and simultaneous eutectic and anodic bonding were discussed.A flow rate as high as 3000 ul/min was recorded.Experimental and simulation results of the dependences of the pump flow rate on the voltage and frequency applied on the piezoelectric material are shown and discussed.