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2001•Unpublished venueRequires access

Local Laser Bonding for Low Temperature Budget

Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lizeau, Ch. Nachtigall, H. Sandmaier

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Key concepts: Eutectic system, Anodic bonding, Materials science, Wafer bonding, Eutectic bonding, Wafer, Optoelectronics, Laser

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