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2002•Sensors and Actuators A PhysicalRequires access

Local laser bonding for low temperature budget

Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lietzau, Ch. Nachtigall, H. Sandmaier

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Key concepts: Eutectic system, Anodic bonding, Materials science, Wafer bonding, Eutectic bonding, Wafer, Optoelectronics, Laser

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