EOFM measurements of lateral and vertical Bipolar Transistors in Silicon and SiGe:C Technologies
A. Beyreuther, Norbert Herfurth, Elham Amini, Tohru Nakamura, Gunter Fischer, Stefan Keil, Christian Boit
Abstract
A. Beyreuther, Norbert Herfurth, Elham Amini, Tohru Nakamura, Gunter Fischer, Stefan Keil, Christian Boit
Abstract
This publication presents Electro-Optical Frequency Mapping (EOFM) on lateral and vertical bipolar junction transistors. The acquired EOFM measurements are used to characterize the different operation modes of a parasitic bipolar junction transistor, as well as a modern heterojunction bipolar transistors (HBT) in SiGe:C BiCMOS technology. Furthermore, EOFM results of a golden and a faulty SiGe:C HBT are compared, showing clearly distinguishable results.
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This publication presents Electro-Optical Frequency Mapping (EOFM) on lateral and vertical bipolar junction transistors. The acquired EOFM measurements are used to characterize the different operation modes of a parasitic bipolar junction transistor, as well as a modern heterojunction bipolar transistors (HBT) in SiGe:C BiCMOS technology. Furthermore, EOFM results of a golden and a faulty SiGe:C HBT are compared, showing clearly distinguishable results.
Key concepts: Heterojunction bipolar transistor, Bipolar junction transistor, Heterostructure-emitter bipolar transistor, Optoelectronics, Heterojunction, Materials science, BiCMOS, Transistor