2005•The Proceedings of the Dynamics & Design ConferenceOpen access

611 A Miniaturization and Evaluation of Transducers for Micro Ultrasonic Motors

Yusuke Matsunaga, Takefumi Kanda, Yoshitaka OMORI, Koichi Suzumori

Abstract

In this paper, an evaluation of transducer for a micro ultrasonic motor is introduced. The motor is a traveling wave type ultrasonic motor driven by the cylindrical shaped bulk piezoelectric vibrator, a diameter of 0.8 mm and 2.2 mm. The dimensions of the motor were 1.8 mm of diameter and 5.8 mm of height. We have fabricated the transducer, the vibrator for the driving of motor, and evaluated its characteristics.

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Available abstract

Key concepts: Ultrasonic motor, Vibrator (electronic), Miniaturization, Transducer, Acoustics, Ultrasonic sensor, Piezoelectric motor, Piezoelectricity