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2005•Unpublished venueOpen access

A cylindrical micro ultrasonic motor using micro-machined piezoelectric vibrator

Takefumi Kanda, A. Makino, Y. Oomori, Koichi Suzumori

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Abstract

A micro ultrasonic motor using a micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator is 0.8 mm and that of the motor case is 1.8 mm. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor is not complicated. In addition, the vibrator and rotor are supported by the glass case. This is important for the micro ultrasonic motor because it is difficult to support the vibrator when the vibrator is miniaturized. We have fabricated and evaluated the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.

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What this paper is about

A micro ultrasonic motor using a micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator is 0.8 mm and that of the motor case is 1.8 mm. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor is not complicated. In addition, the vibrator and rotor are supported by the glass case. This is important for the micro ultrasonic motor because it is difficult to support the vibrator when the vibrator is miniaturized. We have fabricated and evaluated the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.

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Available abstract

A micro ultrasonic motor using a micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator is 0.8 mm and that of the motor case is 1.8 mm. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor is not complicated. In addition, the vibrator and rotor are supported by the glass case. This is important for the micro ultrasonic motor because it is difficult to support the vibrator when the vibrator is miniaturized. We have fabricated and evaluated the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.

Key concepts: Vibrator (electronic), Ultrasonic motor, Acoustics, Stator, Piezoelectricity, Piezoelectric motor, Ultrasonic sensor, Rotor (electric)

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