2003•Preprints of Annual Meeting of The Ceramic Society of Japan Preprints of Fall Meeting of The Ceramic Society of Japan 16th Fall Meeting of The Ceramic Society of Japan & The 5th International Meeting of Pacific Rim Ceramic Societies(PacRim5)Requires access

Photoluminescence of ZnO Thin Films Prepared by RF Magnetron Sputtering

Mitsuhiro Okamoto, Yukari Ishikawa, Kazuyuki Kondo, Noriyoshi Shibata

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Key concepts: Photoluminescence, Sputter deposition, Materials science, Thin film, Sputtering, Cavity magnetron, High-power impulse magnetron sputtering, Optoelectronics