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Characteristics of ZnO/Glass thin films prepared by RF magnetron sputtering

윤석진, 김현재, 박창엽, 박용욱, 최지원, 정형진

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Key concepts: Materials science, Sputter deposition, Optoelectronics, Sputtering, Thin film, Cavity magnetron, High-power impulse magnetron sputtering, Nanotechnology

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