2009•半导体学报：英文版Requires access
Magnetic properties of ZnO：Cu thin films prepared by RF magnetron sputtering
卓世异, 熊予莹, 顾敏
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卓世异, 熊予莹, 顾敏
Abstract
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Key concepts: Sputter deposition, Materials science, Optoelectronics, Thin film, Sputtering, Cavity magnetron, High-power impulse magnetron sputtering, Metallurgy