2012•Operations research, computer science. Interface seriesRequires access

Production Planning and Control for Semiconductor Wafer Fabrication Facilities

Lars Mönch, John Fowler, Scott J. Mason

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Key concepts: Wafer, Semiconductor device fabrication, Wafer fabrication, Semiconductor, Manufacturing engineering, Integrated circuit, Control (management), Fabrication

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Production Planning and Control for Semiconductor Wafer Fabrication Facilities — Research Paper | ScholarLens