Environment-friendly Chemical Polishing Technology of BFe10-1-1 Copper Alloy
Jinyu Yang
Abstract
Jinyu Yang
Abstract
Taking H2O2 as main oxidant,the process of environment-friendly chemical polishing of BFe10-1-1 copper alloy was investigated.The influence of type of brightener,type of corrosion inhibitor,type of stabilizer of hydrogen peroxide,the polishing solution composition and polishing condition including polishing temperature and polishing time on the surface quality of the polished BFe10-1-1 copper alloy was discussed,and processing condition was optimized.The optimum composition of the chemical polishing solution for the BFe10-1-1 copper alloy was recommended to be composed of 350 mL/L hydrogen peroxide(30%),50 mL/L sulfuric acid,17~20 mL/L ethyl alcohol,1 mL/L OP-10,and 1 g/L 1,2,3-Benzotriazole,while the optimized polishing condition was suggested as temperature about 50 ℃ and polishing time 3~5 min.
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Taking H2O2 as main oxidant,the process of environment-friendly chemical polishing of BFe10-1-1 copper alloy was investigated.The influence of type of brightener,type of corrosion inhibitor,type of stabilizer of hydrogen peroxide,the polishing solution composition and polishing condition including polishing temperature and polishing time on the surface quality of the polished BFe10-1-1 copper alloy was discussed,and processing condition was optimized.The optimum composition of the chemical polishing solution for the BFe10-1-1 copper alloy was recommended to be composed of 350 mL/L hydrogen peroxide(30%),50 mL/L sulfuric acid,17~20 mL/L ethyl alcohol,1 mL/L OP-10,and 1 g/L 1,2,3-Benzotriazole,while the optimized polishing condition was suggested as temperature about 50 ℃ and polishing time 3~5 min.
Key concepts: Polishing, Benzotriazole, Hydrogen peroxide, Alloy, Copper, Materials science, Sulfuric acid, Chemical-mechanical planarization