2011Surface TechnologyRequires access

Environment-friendly Chemical Polishing Technology of BFe10-1-1 Copper Alloy

Jinyu Yang

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Abstract

Taking H2O2 as main oxidant,the process of environment-friendly chemical polishing of BFe10-1-1 copper alloy was investigated.The influence of type of brightener,type of corrosion inhibitor,type of stabilizer of hydrogen peroxide,the polishing solution composition and polishing condition including polishing temperature and polishing time on the surface quality of the polished BFe10-1-1 copper alloy was discussed,and processing condition was optimized.The optimum composition of the chemical polishing solution for the BFe10-1-1 copper alloy was recommended to be composed of 350 mL/L hydrogen peroxide(30%),50 mL/L sulfuric acid,17~20 mL/L ethyl alcohol,1 mL/L OP-10,and 1 g/L 1,2,3-Benzotriazole,while the optimized polishing condition was suggested as temperature about 50 ℃ and polishing time 3~5 min.

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What this paper is about

Taking H2O2 as main oxidant,the process of environment-friendly chemical polishing of BFe10-1-1 copper alloy was investigated.The influence of type of brightener,type of corrosion inhibitor,type of stabilizer of hydrogen peroxide,the polishing solution composition and polishing condition including polishing temperature and polishing time on the surface quality of the polished BFe10-1-1 copper alloy was discussed,and processing condition was optimized.The optimum composition of the chemical polishing solution for the BFe10-1-1 copper alloy was recommended to be composed of 350 mL/L hydrogen peroxide(30%),50 mL/L sulfuric acid,17~20 mL/L ethyl alcohol,1 mL/L OP-10,and 1 g/L 1,2,3-Benzotriazole,while the optimized polishing condition was suggested as temperature about 50 ℃ and polishing time 3~5 min.

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Available abstract

Taking H2O2 as main oxidant,the process of environment-friendly chemical polishing of BFe10-1-1 copper alloy was investigated.The influence of type of brightener,type of corrosion inhibitor,type of stabilizer of hydrogen peroxide,the polishing solution composition and polishing condition including polishing temperature and polishing time on the surface quality of the polished BFe10-1-1 copper alloy was discussed,and processing condition was optimized.The optimum composition of the chemical polishing solution for the BFe10-1-1 copper alloy was recommended to be composed of 350 mL/L hydrogen peroxide(30%),50 mL/L sulfuric acid,17~20 mL/L ethyl alcohol,1 mL/L OP-10,and 1 g/L 1,2,3-Benzotriazole,while the optimized polishing condition was suggested as temperature about 50 ℃ and polishing time 3~5 min.

Key concepts: Polishing, Benzotriazole, Hydrogen peroxide, Alloy, Copper, Materials science, Sulfuric acid, Chemical-mechanical planarization

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