2006•Surface TechnologyRequires access

Research on Chemical Polishing of Copper and its Alloy

Jie Zhang

Abstract

The technology of copper and its alloy is studied.Based on the orthogonal experiment,the effect of some control factors,such as concentration of individual component,temperature and operation-times on the quality of polished copper and its alloy are discussed.The result concludes that the polishing solution is innocuous and harmless to the environment.The effort of chemical polishing is terrific.

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Available abstract

Key concepts: Polishing, Copper, Alloy, Metallurgy, Materials science, Component (thermodynamics), Copper alloy, Chemical-mechanical planarization