Measurement the Thickness of a Thin Film by Automatic and Non-contact
Cheng Chen
Abstract
Cheng Chen
Abstract
According to the theory of equal thickness interference of white light,we have used the Michelson interferrometer reformed based on MCU to automatically measure the thickness of a transparent thin film,which is a non-contact method.When the angle between the virtual image of the static mirror and the dynamic mirror of the Michelson interferometer is very small,the colored interference fringes will appear.After inserting a thin film,the interference fringes disappear because the optical path difference changed.With rotating of the fine-tuning hand-wheel driven by stepping motor,the thickness of the thin film is measured when the interference fringes appears again.
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According to the theory of equal thickness interference of white light,we have used the Michelson interferrometer reformed based on MCU to automatically measure the thickness of a transparent thin film,which is a non-contact method.When the angle between the virtual image of the static mirror and the dynamic mirror of the Michelson interferometer is very small,the colored interference fringes will appear.After inserting a thin film,the interference fringes disappear because the optical path difference changed.With rotating of the fine-tuning hand-wheel driven by stepping motor,the thickness of the thin film is measured when the interference fringes appears again.
Key concepts: Interference (communication), Optics, Michelson interferometer, Materials science, Interferometry, White light interferometry, Thin film, Optical path length