Measurement of Film Thickness by Michelson's Interferometer

Measurement of film thickness by using Michelson's interfere principle has been introduced in this paper. As the examples,the film thicknesses of the PE clear plastic wrap and transparent plastic film have been measured. It is a kind of practical and valid method that exactly measures the film thickness by using colored fringe that originates from white-light interference and calculates the film thickness by collecting experimental data of interference. The measuring range of this method is between 1μm and 1 cm,and the resolution is 0.1μm.