2014•Physics ExperimentationRequires access
Rotating sample method to measure thickness of transparent glass wafer using Michelson interferometer
Wang Ren-zho
Open publisher page 0 citations
Abstract
A rotating sample method to measure the thickness of transparent glass wafer was proposed using a Michelson interferometer.In comparison to the traditional method based on the interference of white beams,the different interference fringes were generated by changing the angle between the wafer and the light.The thickness of the transparent glass wafer was accurately measured according to the changes of the fringes and the rotation angle.