GU Quwu
Abstract
As a modified heterodyne profilometer the heterodyne common path surface profilometer for measuring surface roughness is described. The profilometer is not sensitive to mechanical instability and temperature variations. The actual height resolution is 0. 1 nm and this system could be developed into a standard instrument for surface roughness measurement.
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As a modified heterodyne profilometer the heterodyne common path surface profilometer for measuring surface roughness is described. The profilometer is not sensitive to mechanical instability and temperature variations. The actual height resolution is 0. 1 nm and this system could be developed into a standard instrument for surface roughness measurement.
Key concepts: Profilometer, Optics, Heterodyne (poetry), Surface roughness, Surface finish, Materials science, Remote sensing, Acoustics