YU Ying-ji
Abstract
A cirele scanning method is Proposed to measare surface roughness with a heterodyne interferometer. Pa-rameter Rz can be meased with an uncertainty of less than 6nm.
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A cirele scanning method is Proposed to measare surface roughness with a heterodyne interferometer. Pa-rameter Rz can be meased with an uncertainty of less than 6nm.
Key concepts: Surface roughness, Surface finish, Surface (topology), Materials science, Computer science, Mathematics, Geometry, Composite material