2001•Guangdian gongchengRequires access
A Laser Profilometer for On-Line Measuring Microprofile of Super-Fine Surface
Wenjie Li
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Abstract
A high-resolution laser profilometer that can be applied to on-line and on-machine measurements is introduced in the paper. The instrument has a high common-mode rejection ratio and smallest form error among the same kind of existing profilometers. Its resolution is less than 0.2nm (R a). The instrument can be placed on the carriage of the diamond lathe for measuring microprofile of the super-fine surfaces.