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The Effects of Substrate Temperature on the Properties of ZnO:Al Thin Films Prepared by RF Magnetron Sputtering.

Yasuhiro Igasaki

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Key concepts: Materials science, Sputter deposition, Substrate (aquarium), Sputtering, Optoelectronics, Thin film, Cavity magnetron, High-power impulse magnetron sputtering

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The Effects of Substrate Temperature on the Properties of ZnO:Al Thin Films Prepared by RF Magnetron Sputtering. — Research Paper | ScholarLens