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2002•Dirāsāt. Al-ʿulūm al-asāsiyyaẗRequires access

Hafnium Oxide Thin films On Polymer Substrates Grown by Dual Ion Beam Sputtering

Francesca Sarto, L. Abu Hassan, Marco Alvisi, Luisa Caneve, S. Scaglione

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Key concepts: Sputtering, Hafnium, Materials science, Ion beam, Oxide, Polymer, Thin film, Ion

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