V. Guidi, Elisabetta Comini, G. Faglia, Matteo Ferroni
Abstract
In this paper we review the gas-sensing properties of Ti, W, and Mo mixed oxides as thin films achieved via reactive sputtering. We focused on the structural characterization of the films, which proved to be an essential tool for optimization of performance.
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In this paper we review the gas-sensing properties of Ti, W, and Mo mixed oxides as thin films achieved via reactive sputtering. We focused on the structural characterization of the films, which proved to be an essential tool for optimization of performance.
Key concepts: Sputtering, Characterization (materials science), Materials science, Thin film, Group (periodic table), Nanotechnology, Chemical engineering, Optoelectronics