2014•Applied Mechanics and MaterialsOpen access

Fabrication and Properties of Patterned Nichrome Thin Film Using MEMs Technology

Jie Han, Ping Cheng, Cong Chun Zhang, Gui Fu Ding

Abstract

A patterned nichrome thin film used for strain gauge was prepared on the glass substrate using microelectromechanical system (MEMS) micromachining process. The nichrome sensitive element had a width of 10μm and a thickness of 0.3μm. The electrical properties of the nichrome film were investigated, and a stable TCR of 1.2×10-4/°C was obtained.

About this research paper

What this paper is about

Why it matters

OpenAlex reports 1 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Key concepts: Nichrome, Materials science, Microelectromechanical systems, Fabrication, Substrate (aquarium), Surface micromachining, Optoelectronics, Thin film