Vijay K. Varadan, K. J. Vinoy, K. A. Jose
Abstract
This chapter contains sections titled: Metals Semiconductors Thin Films for MEMS and Their Deposition Techniques Materials for Polymer MEMS Bulk Micromachining for Silicon-based MEMS Silicon Surface Micromachining Microstereolithography for Polymer MEMS Conclusions References
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This chapter contains sections titled: Metals Semiconductors Thin Films for MEMS and Their Deposition Techniques Materials for Polymer MEMS Bulk Micromachining for Silicon-based MEMS Silicon Surface Micromachining Microstereolithography for Polymer MEMS Conclusions References
Key concepts: Microelectromechanical systems, Surface micromachining, Fabrication, Materials science, Silicon, Bulk micromachining, Deposition (geology), Polymer