2006•Unpublished venueRequires access

Silicon Fabrication Techniques for MEMS

Vijay K. Varadan, K. J. Vinoy M.Tech, Ph.D., S. Gopalakrishnan Master's Degree in Engineering Mechanics, Ph.D.

Abstract

This chapter contains sections titled: Introduction Fabrication processes for silicon MEMS Deposition techniques for thin films in MEMS Bulk micromachining for silicon-based MEMS Silicon surface micromachining Processing by both bulk and surface micromachining LIGA process References

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Available abstract

Key concepts: Microelectromechanical systems, Surface micromachining, LIGA, Fabrication, Silicon, Materials science, Bulk micromachining, Deposition (geology)