1999Unpublished venueRequires access

Wafer fab conversion through theory of constraint project management techniques

Jochim Fritz, Jeffrey G. Benjamin, R. Rerick

Open publisher page 3 citations

Abstract

Summary form only given. The drive for manufacturing on larger diameter wafers has been strong for the past few years and is projected to continue. Although the benefits of running production on larger diameter wafers has long been established throughout the industry, the capital investment to start a 300 mm or 200 mm fab from scratch can be difficult to justify. One alternative to the "brick and mortar" option is to convert an existing facility. Faced with increasing competitive pressures, Harris Semiconductor Mountaintop Operations, made the strategic decision to convert their existing facility. This paper will describe in detail how the Mountaintop team shut down an old 5 inch facility, converted the necessary tools and fabrication area to 6 inch capability, and began a production ramp-up in 6 short months. The converted fab, approximately 6,700 square feet, is now integrated into the pre-existing 6 inch facility. For optimum work flow, layout in the newly constructed area was designed to mirror the process functions of the existing fab, with cleanroom areas rated as class 10 or better. Capital investment was minimal and no new production tools were purchased.

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What this paper is about

Summary form only given. The drive for manufacturing on larger diameter wafers has been strong for the past few years and is projected to continue. Although the benefits of running production on larger diameter wafers has long been established throughout the industry, the capital investment to start a 300 mm or 200 mm fab from scratch can be difficult to justify. One alternative to the "brick and mortar" option is to convert an existing facility. Faced with increasing competitive pressures, Harris Semiconductor Mountaintop Operations, made the strategic decision to convert their existing facility. This paper will describe in detail how the Mountaintop team shut down an old 5 inch facility, converted the necessary tools and fabrication area to 6 inch capability, and began a production ramp-up in 6 short months. The converted fab, approximately 6,700 square feet, is now integrated into the pre-existing 6 inch facility. For optimum work flow, layout in the newly constructed area was designed to mirror the process functions of the existing fab, with cleanroom areas rated as class 10 or better. Capital investment was minimal and no new production tools were purchased.

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Available abstract

Summary form only given. The drive for manufacturing on larger diameter wafers has been strong for the past few years and is projected to continue. Although the benefits of running production on larger diameter wafers has long been established throughout the industry, the capital investment to start a 300 mm or 200 mm fab from scratch can be difficult to justify. One alternative to the "brick and mortar" option is to convert an existing facility. Faced with increasing competitive pressures, Harris Semiconductor Mountaintop Operations, made the strategic decision to convert their existing facility. This paper will describe in detail how the Mountaintop team shut down an old 5 inch facility, converted the necessary tools and fabrication area to 6 inch capability, and began a production ramp-up in 6 short months. The converted fab, approximately 6,700 square feet, is now integrated into the pre-existing 6 inch facility. For optimum work flow, layout in the newly constructed area was designed to mirror the process functions of the existing fab, with cleanroom areas rated as class 10 or better. Capital investment was minimal and no new production tools were purchased.

Key concepts: Cleanroom, Wafer fabrication, Semiconductor device fabrication, Wafer, Manufacturing engineering, Investment (military), Production (economics), Engineering

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