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Electrostatic Charge Generation on Wafer Surfaces and its Effect on Particulate Deposition

Mark Blitshteyn, A. Robledo Martinez

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Key concepts: Cleanroom, Wafer, Deposition (geology), Wafer backgrinding, Materials science, Semiconductor, Semiconductor device fabrication, Particle (ecology)

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Electrostatic Charge Generation on Wafer Surfaces and its Effect on Particulate Deposition — Research Paper | ScholarLens