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1997•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

Ion implantation in 6HSiC

M. Veeramohan Rao, D. Kirk Nordstrom, Jason A. Gardner, Andrew Edwards, E. G. Roth, G. Kelner, M. Ridgway

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Key concepts: Ion implantation, Ion, Materials science, Radiochemistry, Chemistry, Organic chemistry

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