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2019•The Japan Society of Applied PhysicsRequires access

High-precision ion-implantation on 4H-SiC by ion-implantation angle control

Tomonori Okada, Jun Inoue, Fumitaka Nishiyama, Hiroshi Sezaki, Shin-Ichiro Kuroki

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Key concepts: Materials science, Ion implantation, Ion, Optoelectronics, Engineering physics, Nanotechnology, Engineering, Physics

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