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2001•Materials science forumOpen access

Ion Implantation Induced Defects in 6H-SiC and their Annealing Behaviour

W. Anwand, G. Bräuer, D. Panknin, W. Skorupa

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Key concepts: Materials science, Annealing (glass), Ion implantation, Ion, Crystallography, Optoelectronics, Metallurgy, Physics

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