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2002•Materials science forumOpen access

Phosphorus Ion Implantation into 4H-SiC (0001) and (11-20)

Yuki Negoro, N. Miyamoto, Tsunenobu Kimoto, Hiroyuki Matsunami

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Key concepts: Materials science, Ion implantation, Phosphorus, Ion, Radiochemistry, Metallurgy, Chemistry, Organic chemistry

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