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New Era of Semiconductor Manufacturing(2)Breakthrough for Everlasting Prosperity of Semiconductor Industry--Proposal of Zero Emission Semiconductor Fab. Operation--″Fluorine Circulation″

Nobuhiro Miki, Tadahiro Ohmi

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Key concepts: Prosperity, Semiconductor industry, Semiconductor, Semiconductor device fabrication, Zero (linguistics), Semiconductor materials, Engineering physics, Engineering

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New Era of Semiconductor Manufacturing(2)Breakthrough for Everlasting Prosperity of Semiconductor Industry--Proposal of Zero Emission Semiconductor Fab. Operation--″Fluorine Circulation″ — Research Paper | ScholarLens