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New Era of Semiconductor Manufacturing (1)Breakthrough for Everlasting Prosperity of Semiconductor Industry --Proposal of very compact manufacturing system for 300 mm wafer from Tohoku University

Tadahiro Ohmi

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Key concepts: Prosperity, Semiconductor industry, Semiconductor device fabrication, Wafer, Manufacturing engineering, Semiconductor, Semiconductor materials, Manufacturing

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New Era of Semiconductor Manufacturing (1)Breakthrough for Everlasting Prosperity of Semiconductor Industry --Proposal of very compact manufacturing system for 300 mm wafer from Tohoku University — Research Paper | ScholarLens