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New Era of Semiconductor Manufacturing(3) Breakthrough for Everlasting Prosperity of Semiconductor Industry--Proposal of very compact manufacturing system for 300 mm wafer from Tohoku University

Masaki Hirayama, Tadahiro Ohmi

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Key concepts: Prosperity, Semiconductor industry, Semiconductor device fabrication, Wafer, Manufacturing engineering, Semiconductor, Semiconductor materials, Engineering

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New Era of Semiconductor Manufacturing(3) Breakthrough for Everlasting Prosperity of Semiconductor Industry--Proposal of very compact manufacturing system for 300 mm wafer from Tohoku University — Research Paper | ScholarLens