2023•Plasma Chemistry and Plasma ProcessingRequires access

Highly Selective Plasma Etching Technique for Molybdenum

Artem A. Osipov, Nikolai Andrianov, Anastasia B. Speshilova, Alina E. Gagaeva, Sarah Risquez, Alexandr Vorobyev, Sergey Alexandrov

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Key concepts: Photoresist, Etching (microfabrication), Molybdenum, Dry etching, Reactive-ion etching, Plasma etching, Materials science, Substrate (aquarium)

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