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CHF3-reactive ion etching for waveguides

Carlos Domı́nguez, Francesc Xavier Muñoz, R. Gonzalez, M. Tudanca

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Key concepts: Photoresist, Reactive-ion etching, Etching (microfabrication), Materials science, Ionic bonding, Photolithography, Optoelectronics, Oxide

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CHF3-reactive ion etching for waveguides — Research Paper | ScholarLens