1989•Journal of Non-Crystalline SolidsRequires access

Dry etched high resolution positive and negative inorganic photoresist

E. Hajtó, Rona E. Belford, Peter J. S. Ewen, Albert Edward Owen

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Key concepts: Photoresist, Dry etching, Etching (microfabrication), Resolution (logic), Materials science, High resolution, Reactive-ion etching, Nanotechnology

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Dry etched high resolution positive and negative inorganic photoresist — Research Paper | ScholarLens