M. E. Zaghloul
Abstract
This chapter contains sections titled: Introduction Microfabrication Procedures Design and Simulations Fabrication Foundries Examples of Mems Devices and their Applications Conclusions Appendix: Books on Mems References
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This chapter contains sections titled: Introduction Microfabrication Procedures Design and Simulations Fabrication Foundries Examples of Mems Devices and their Applications Conclusions Appendix: Books on Mems References
Key concepts: Microelectromechanical systems, Microfabrication, Fabrication, Engineering, Computer science, Mechanical engineering, Systems engineering, Nanotechnology