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2005•Unpublished venueRequires access

Microactuation of Suspended MEMS Beams

Giorgio E. Gattiker, K.V.I.S. Kaler, Martin P. Mintchev

Open publisher page 1 citations

Abstract

This study presents the design, implementation, and testing of microelectromechanical system (MEMS)-based actuators. The concepts of electrostatic and thermal microactuation are discussed. Geometrically identical fixed-fixed microbeams were fabricated to compare quantitatively the two different actuation principles. The beams are implemented with Micralyne generalized MEMS (MicraGEM) technology, a silicon-on-insulator (SOI)-based microfabrication process.

About this research paper

What this paper is about

This study presents the design, implementation, and testing of microelectromechanical system (MEMS)-based actuators. The concepts of electrostatic and thermal microactuation are discussed. Geometrically identical fixed-fixed microbeams were fabricated to compare quantitatively the two different actuation principles. The beams are implemented with Micralyne generalized MEMS (MicraGEM) technology, a silicon-on-insulator (SOI)-based microfabrication process.

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Available abstract

This study presents the design, implementation, and testing of microelectromechanical system (MEMS)-based actuators. The concepts of electrostatic and thermal microactuation are discussed. Geometrically identical fixed-fixed microbeams were fabricated to compare quantitatively the two different actuation principles. The beams are implemented with Micralyne generalized MEMS (MicraGEM) technology, a silicon-on-insulator (SOI)-based microfabrication process.

Key concepts: Microelectromechanical systems, Microfabrication, Actuator, Silicon on insulator, Materials science, Silicon, Mechanical engineering, Thermal

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