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2001•IETE Journal of EducationRequires access

VLSI Microfabrication Technologies and MEMS

Rajeevan Chandel

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Abstract

The enormous developments in electronic microfabrication technologies have led to very large scale integration (VLSI) and emergence of an era of microelectromechanical systems (MEMS). The fascinating aspect of the field of MEMS and microdevices is its multidimensional nature. The various materials used and VLSI microfabrication technologies in general and microelectromechanical devices in particular have been presented in this paper. Some of their technological and application aspects have been reviewed. The trends in VLSI technology and MEMS have also been given.

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What this paper is about

The enormous developments in electronic microfabrication technologies have led to very large scale integration (VLSI) and emergence of an era of microelectromechanical systems (MEMS). The fascinating aspect of the field of MEMS and microdevices is its multidimensional nature. The various materials used and VLSI microfabrication technologies in general and microelectromechanical devices in particular have been presented in this paper. Some of their technological and application aspects have been reviewed. The trends in VLSI technology and MEMS have also been given.

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Available abstract

The enormous developments in electronic microfabrication technologies have led to very large scale integration (VLSI) and emergence of an era of microelectromechanical systems (MEMS). The fascinating aspect of the field of MEMS and microdevices is its multidimensional nature. The various materials used and VLSI microfabrication technologies in general and microelectromechanical devices in particular have been presented in this paper. Some of their technological and application aspects have been reviewed. The trends in VLSI technology and MEMS have also been given.

Key concepts: Microfabrication, Microelectromechanical systems, Very-large-scale integration, Computer science, Nanotechnology, Electronic engineering, Materials science, Engineering

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