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Plasma-enhanced chemical vapour deposition of microcrystalline silicon: on the dynamics of the amorphous-microcrystalline interface by optical methods

R. Rizzoli C. Summonte

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Key concepts: Microcrystalline, Microcrystalline silicon, Materials science, Chemical vapor deposition, Interface (matter), Amorphous solid, Plasma-enhanced chemical vapor deposition, Amorphous silicon

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Plasma-enhanced chemical vapour deposition of microcrystalline silicon: on the dynamics of the amorphous-microcrystalline interface by optical methods — Research Paper | ScholarLens