2005•MRS ProceedingsRequires access

High Efficiency Solar Cells with Intrinsic Microcrystalline Silicon Absorbers Deposited at High Rates by VHF-PECVD

Yaohua Mai, Stefan Klein, Reinhard Carius, Xinhua Geng, F. Finger

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Key concepts: Plasma-enhanced chemical vapor deposition, Microcrystalline silicon, Materials science, Homogeneity (statistics), Microcrystalline, Deposition (geology), Energy conversion efficiency, Solar cell