2020•Elsevier eBooksRequires access
Silicon direct bonding
Thomas Plach, Kimmo Henttinen, Tommi Suni, Viorel Drăgoi
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Abstract
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Thomas Plach, Kimmo Henttinen, Tommi Suni, Viorel Drăgoi
Abstract
An abstract is not available in the OpenAlex record for this paper.
OpenAlex reports 3 citations for this work. Citation counts describe recorded attention and do not establish research quality.
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Key concepts: Anodic bonding, Direct bonding, Wafer, Wafer bonding, Materials science, Silicon, Microelectromechanical systems, Thermocompression bonding