ScholarLens Back to search
2021•2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS)Requires access

Modeling Electrostatic MEMS Actuator

Zdeněk Kolka, Viera Biolková, Dalibor Biolek, Zdeněk Biolek

Open publisher page 3 citations

Abstract

The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.

About this research paper

What this paper is about

The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.

Why it matters

OpenAlex reports 3 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.

Key concepts: Microelectromechanical systems, Actuator, Comb drive, Hysteresis, Port (circuit theory), Mechanical system, Electrostatics, Voltage

Related papers

Related paper 1Related paper 2
Back to paper searchBrowse research topicsOriginal source
Modeling Electrostatic MEMS Actuator — Research Paper | ScholarLens