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2015•Unpublished venueRequires access

Analysis of MEMS electrostatic comb drive with polysilicon as the structural material

Himanshu Ranjan Das, R. Nakkeeran

Open publisher page 2 citations

Abstract

Microelectromechanical Systems (MEMS) has led to a drastic development in the field of sensors. This paper presents a new design of a electrostatic comb drive with different parameters. The analysis of MEMS electrostatic comb drive is done with different structures. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. COMSOL Multyphysics 4.4 is used for designing the comb drive. It offers Finite element analysis to prove the concept of displacement of movable comb fingers, achieved by the amount of electrostatic force generated by the device.

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What this paper is about

Microelectromechanical Systems (MEMS) has led to a drastic development in the field of sensors. This paper presents a new design of a electrostatic comb drive with different parameters. The analysis of MEMS electrostatic comb drive is done with different structures. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. COMSOL Multyphysics 4.4 is used for designing the comb drive. It offers Finite element analysis to prove the concept of displacement of movable comb fingers, achieved by the amount of electrostatic force generated by the device.

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OpenAlex reports 2 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Microelectromechanical Systems (MEMS) has led to a drastic development in the field of sensors. This paper presents a new design of a electrostatic comb drive with different parameters. The analysis of MEMS electrostatic comb drive is done with different structures. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. COMSOL Multyphysics 4.4 is used for designing the comb drive. It offers Finite element analysis to prove the concept of displacement of movable comb fingers, achieved by the amount of electrostatic force generated by the device.

Key concepts: Comb drive, Microelectromechanical systems, Actuator, Displacement (psychology), Voltage, Finite element method, Materials science, Electronic engineering

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