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2017•Unpublished venueRequires access

A vertical bi-directional electrostatic comb driver for optical MEMS devices

Siyuan He

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Abstract

Micro electrostatic actuators play an important role in driving optical MEMS devices such as spatial light modulators, micro mirrors, and MEMS tunable lasers. The wide acceptance of electrostatic actuators is due in large to the fact that they are simple, they offer a fast response and low power consumption, and are potentially cheap when high volume is involved [ l ] -[3 ] .

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What this paper is about

Micro electrostatic actuators play an important role in driving optical MEMS devices such as spatial light modulators, micro mirrors, and MEMS tunable lasers. The wide acceptance of electrostatic actuators is due in large to the fact that they are simple, they offer a fast response and low power consumption, and are potentially cheap when high volume is involved [ l ] -[3 ] .

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Available abstract

Micro electrostatic actuators play an important role in driving optical MEMS devices such as spatial light modulators, micro mirrors, and MEMS tunable lasers. The wide acceptance of electrostatic actuators is due in large to the fact that they are simple, they offer a fast response and low power consumption, and are potentially cheap when high volume is involved [ l ] -[3 ] .

Key concepts: Microelectromechanical systems, Comb drive, Actuator, Power consumption, Materials science, Optoelectronics, Optical switch, Power (physics)

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