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2006•Elsevier eBooksRequires access

Micro- and nano- structuring using ion beams

Andreas Dietzel, W.H. Bruenger, Hans Loeschner, Elmar Platzgummer

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Key concepts: Materials science, Ion beam lithography, Ion beam, Stencil lithography, Nanodevice, Lithography, Focused ion beam, Micrometer

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