Development of the combination of SPM nanolithography and molecular self-assembly method:Fabrication of planned functional nanostructures on solid substrate

The combination of scanning probe micronoscopy(SPM) nanolithography and selfassembly method has made it possible to fabricate not only planned functional nanostructures on solid substrate,but also the complex architectures with well controlled over a wide range of length scales and nanodevice.This article briefly introduces the research advance of SPM nanolithography and the origin of the self-assembly monolayer method.Emphasis is given to the Constructive and Dip-Pen nanolithography due to the rapid progress and wide application of these techniques.