2021•Nanomanufacturing and MetrologyRequires access

A Comprehensive FIB Lift-out Sample Preparation Method for Scanning Probe Microscopy

Fan Ji, Yin Yao, Tongzheng Xin, Jan Seidel

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Key concepts: Focused ion beam, Materials science, Polishing, Sample preparation, Scanning electron microscope, Transmission electron microscopy, Scanning probe microscopy, Microscopy

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A Comprehensive FIB Lift-out Sample Preparation Method for Scanning Probe Microscopy — Research Paper | ScholarLens