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2016•The Japan Society of Applied PhysicsRequires access

Activation of Silicon by Ion Implantation under Heating Sample

Keisuke Yasuta, Masahiko Hasumi, Tomokazu Nagao, Yutaka Inouchi, Toshiyuki Sameshima

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Key concepts: Materials science, Silicon, Ion implantation, Sample (material), Ion, Optoelectronics, Nanotechnology, Chromatography

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