2011•Journal of the Korean Physical SocietyRequires access

Low-temperature Atomic Layer Deposition of TiO2, Al2O3, and ZnO Thin Films

Taewook Nam, Jae‐Min Kim, Min‐Kyu Kim, Hyungjun Kim, Woo‐Hee Kim

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Key concepts: Atomic layer deposition, Materials science, Layer (electronics), Thin film, Atomic layer epitaxy, Deposition (geology), Chemical engineering, Optoelectronics

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Low-temperature Atomic Layer Deposition of TiO2, Al2O3, and ZnO Thin Films — Research Paper | ScholarLens